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Semitest sca-2500 wafer surface charge analyzer w/ al-1
NEW SemiTest SCA-2500 Wafer Surface Charge Analyzer with the AL-1 Automatic Wafer Loader
Comes with a Training, AL-1, and SCA-2500 set of manuals and everything you see in the pictures. If you don't see it, you probably wont get it.
Specifications are from Semi-Test and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
The units are brand new and guaranteed to work. There is no software included (The software and licensing is $15,000.00 from the Factory)
List Price for SCA-2500: $170,000.00
List Price for the AL-1 (with prealigner option): $86,000.00
Manufacturer's Website for the SCA-2500: Click here!
The SCA-2500's Serial Tag Reads:
Single Phase: Frequency 50/60 Hz, 750 VA Max.
Vacuum: 600 mm of Mercury (Hg) minimum.
Nitrogen (if used): 15 PSIG (1.0 Bar) Min., 100 PSIG (6.7 Bar) Max.
Single Phase: Frequency 50/60 Hz, 1000 VA Max.
Vacuum: 20 inches of Mercury (Hg) minimum.
Link to the Brochure: SemiTest SCA-2500 Surface Charge Analyzer
In Addition to the Main Units there is the Following:
* Hewlett Packard 692C Color Inkjet Printer (Not intended for clean room use)
* Key Tronic Track101 101-Key Keyboard with a Trackball
* SCA Checkout Wafer (NSC=1.22 E 15)
* Qty. 4: SCA Probes Model C2B
* Wafer Platform (goes into the SCA-2500)
* Serial Port Cables included Z-bot, Aligner and more
SCA-2500 Surface Charge Analyzer Basic Measurement Capabilities:
The SCA-2500 Surface Charge Analyzer is a semiconductor production-monitoring instrument, which is also excellent for use in developing and optimizing new processes. The parameters it measures have been shown to change when there is chemical contamination or when there is a change in the manufacturing process. The SCA can measure wafers with no oxide (bare wafers) as well as wafers with oxide or other dielectric films. In most applications, no post-processing of wafers is required, making the results immediately available and avoiding the traditional problem of "false alarms" contamination that occurs in post-processing rather than in the process being measured. The same monitor wafers used for other purposes, such as particle count, can be used for making SCA measurements, reducing operating costs, and making more capacity available for revenue-producing production.
The SCA-2500 is useful for monitoring the following processes:
In developing and optimizing processes, the SCA can measure repeatability from run to run and variability within a wafer, as well as at different locations in a furnace.
The SCA measurement method is an electro-optical extension of C-V. It works by shining modulated light on the semiconductor and measuring the resultant ac surface potential. THe SCA does this under varying levels of induced charge, Qind.
The ac surface potential is directly proportional of the depletion width of the silicon, Wd. The SCA displays plots of Wd as a function of Qind. From these plots, the SCA calculates the following parameters:
* Semiconductor type, n or p
* Surface doping concentration, Nsc
* Density of interface traps, Dit
* Interface quality factory, IQF
The SCA outputs the values of the parameters measured at each measurement point on the wafer. It also displays the traditional plot of Dit as a function of energy and statistics for multi-point measurements.
SCA-2500 Surface Charge Analyzer Benefits:
* No post-processing is required.
* Measurement results are not confounded by post-processing.
* Provides results in real time.
* No special oxide (or dielectric) thickness is required.
SCA-2500 Surface Charge Analyzer Specifications:
Doping Concentration (Nsc): ND or NA from 1013 to 1017 cm-3
Total Oxide Charge (Qox): 1 x 109 to 2 x 1012 q/cm2
Density of Interface Traps (Dit): 1010 to 1012 cm-2eV-1 *
Data Displayed: Depletion Width (Wd) versus Induced Charge (Qind), Density of Interface Traps (Dit) versus Energy Distribution (Eit)
Total Area: 6 mm x 6 mm (36 mm2)
Signal (Active) Area: 2 mm diameter
Pressure Applied to Wafer by Probe: 2 oz. total (over 36 mm2 area)
Body Material: Silicone rubber
Wafer Contact Material: Mylar film
Wafer Sizes: 100 to 200 mm diameter
Control System: 3-1/2" (1.44 Mb) diskette drive for exporting data, 850 megabyte (min.) fixed disk for data storage, High-resolution flat-panel display screen, Operator keyboard, Trackball
Dimensions (without AL-1 Loader):
Weight (without AL-1 Loader): 160 lbs. (73 kg)
Power: Factory wired for 100, 115, or 220 V, 50/60 Hz, 750 VA max. Line voltage tolerance +/- 10%
External Vacuum: 530 mm (21 inches) Hg to 710 mm (28 inches) at 0.01 m3/min. (0.31 cfm) 1/4-inch Swagelok fitting
Environment: Requires Class 100 or better area with no particles visible
Clean Room Compatibility: Consistent with Class 10 requirements
* The Interface Quality Factory (IQF) parameter is available for measuring wafers outside the Dit range.
AL-1 Automatic Wafer Loader Introduction:
The SemiTest AL-1 Automatic Wafer Loader is a robotic wafer-transfer instrument for the SCA-2500 Surface Charge Analyzer. A non-edge-contact wafer prealigner is on the unit which is an option. The wafer prealigner provides automatic rotating and centering of the wafer prior to transfer to the SCA measurement chamber.
The AL-1 has the Following Features and Benefits:
* Full integrated operation. All functions are controlled from the SCA keyboard.
* Automatic detection of the cassette size. No mechanical or program changes between wafer diameters.
* User selection of wafers to be tested. Wafer and process identifications can be entered for each wafer.
* Equipment interlocks prevent the wafer from being dropped during electrical power failures if vacuum is maintained.
* Robot motion in x, y, and z directions with stationary cassette pedestal.
* Vacuum pickup on the backside of the wafer.
* Class 10 cleanroom compatibility.
* Non-edge-contact wafer prealigner (option).
AL-1 Automatic Wafer Loader Physical Specifications:
Weight: 230 pounds (105 kg), including SCA
Wafer Sizes: 100 mm, 125 mm, 150 mm, and 200mm
Carrier Type: Fluoroware cassette series 182 and 192
AL-1 Automatic Wafer Loader Facility Requirements:
Environment: Class 100 or better area with no particles visible to the naked eye present at any time
Power: 120 VAC, 60 Hz; 100 VAC, 50/60 Hz; or 220 VAC, 50 Hz. 750 Watt electrical power utility supply
External Vacuum: 550 mm (21 inches) Hg or greater at 0.01 m3/min (0.31 cfm). 1/4-inch Swagelok fitting
AL-1 Automatic Wafer Loader Robot Performance Specifications:
Vertical: 6.7 inches (170 mm)
Rotation: +/- 0.008 inches (0.20 mm) @ 14" extension
Vertical: +/- 0.002 inches (0.05 mm)
Horizontal Extension: +/- 0.004 inches (0.10 mm)
Rotation: 0.4 sec/90 degrees
Vertical: 0.25 sec/inch (0.01 sec/mm)
Extension or retraction: 0.8 sec
Load Capacity: 8 oz. (230 g)
AL-1 Connector: 9-pin female D-sub
SCA-2500 Connector: 25-pin male D-sub
AL-1 Automatic Wafer Loader Prealigner Performance Specifications (Optional Feature included):
Centering Accuracy: 0.005 inches (0.127 mm)
Fiducial Repeatability: 0.25 degrees (0.10 degrees, notch with retry)
Maximum Initial Wafer Eccentricity: 0.25 inches (6.4 mm)
Cyle Time: 4.0 sec typical, 7.5 sec maximum, retry for initial wafer eccentricity greater than 0.1 inches
AngularÓ¨: 0.0 to 360 degrees
Horizontal (X and Y): 0 to 0.250 inches
Vertical (Z): Within 0.500 inch range
Primary Fiducial Type: A flat or notch on the wafer edge
AL-1 connectors: 9-pin female D-sub
SCA-2500 Connectors: 25-pin male D-sub
AL-1 Automatic Wafer Loader Robot Home Position Specifications:
Angular Position: Facing the SCA (parallel to the length of the table)
Radial Position: Retracted position
Vertical Position: Lowered (0 inch) position
AL-1 Automatic Wafer Loader Wafer Cassette Definitions:
For More Pictures of the SCA-2500 Surface Charge Analyzer, Please Click the Following:
* Picture 6 (Measurement Area, still w/original packaging - platform in separate picture)
* Picture 7 (Measurement Area #2, still w/original packaging - platform in separate picture)
* Picture 8 (Connections behind the Side Panel Door)
* Picture 9 (Connections on the back)
* Picture 10 (Connections and Controls on the Front)
For More Pictures of the AL-1 Automatic Wafer Loader, Please Click the Following:
* Picture 12 (AL-1 Controls on the Front)
* Picture 13 (Connections on the back)
* Picture 14 (Pre-Aligner Option, Up-close)
* Picture 15 (Wafer Handler, Up-Close)
* Picture 16 (Cassette Holder, Up-Close)
For More Pictures of the Accessories (still in original packaging), Please Click the Following:
* Picture 18 (Qty. 4: C2B Probes)
* Picture 19 (SCA Checkout Wafer and Dual Reference Capacitor)
* Picture 20 (Package #1: Front - Wafer Platform)
* Picture 21 (Package #1: Back - Power Cords and Lubricant Syringe)
* Picture 22 (Package #2: Front - Mounting Hardware, Air Tubing and Cables)
* Picture 23 (Package #2: Back - Cables)
