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> Tegal plasmaline super 421 (operational)
Tegal plasmaline super 421 (operational)
Operational Dual Channel Isotropic Barrel plasma asher/etcher.Two gas inputs.Heated Al chamber. Endpoint. Holds 2 carriers of 4" wafers.
Tool was upgraded with Auto-tune, ENI ACG-5 RF Generator, VAT ISO Valve, and Baratron gauge.
Available for inspection or Demo.
This tool would make a great Lab Tool.
Includes table. Table and tool size is 25"Wx39"Lx60"H.
Al Chamber inside size is 10"Dx10"Wx5"H.
Power requirements: 115vac 20amps & 208vac 20amps. Weight about 500 lbs.
